Focused Ion Beam Surface Preparation for Plasma Facing Materials

Focused ion beam sample preparation for atom probe tomography

Atom Probe (AP) tomography is maturing into a routine method for the atomic resolution compositional analysis of metals, semiconductors and some polymers. This is often combined with a Transmission Electron Microscope (TEM) analysis of the same region of interest. The Focused Ion Beam (FIB) microscope has evolved as an essential tool for site and orientation specific sample preparation for such...

Focused ion beam preparation of samples for X-ray nanotomography.

The preparation of hard material samples with the necessary size and shape is critical to successful material analysis. X-ray nanotomography requires that samples are sufficiently thin for X-rays to pass through the sample during rotation for tomography. One method for producing samples that fit the criteria for X-ray nanotomography is focused ion beam/scanning electron microscopy (FIB/SEM) whi...

Varnish microlaminations: new insights from focused ion beam preparation

The cross-sectional texture of rock varnish varies considerably with the scale of analysis and technique used to image a sample. Each jump in resolution results in new insight, with the current state-of-the-art resting at the nanoscale. One key to nanoscale analysis involves focused ion beam (FIB) techniques used most frequently in material science and semiconductor failure analysis. FIB prepar...

Focused Ion Beam Lithography

Design of compact microwave plasma ion sources for focused ion beam

Two types of compact microwave plasma ion sources (MWPIS) for focused ion beam (FIB) have been developed. Cavity resonator type plasma ion source is subjected to make resonant electric field in order to ignite plasma efficiently. The optimum length of resonator and antenna, and position of quartz and antenna have been designed by both simple calculation and computer simulation. The other source...